Laser heterodyne interferometer with rotational error compensation for precision displacement measurement
نویسندگان
چکیده
منابع مشابه
Precision displacement measurement by active laser heterodyne interferometry.
We demonstrate an active laser heterodyne interferometer which can automatically compensate environmental disturbances and is capable of precision displacement measurement. Two Zeeman He-Ne lasers were employed. Laser II was used as the light source to stabilize the interferometer by using a piezomirror in a feedback loop. The hetereodyne signal of the two lasers was used to directly calibrate ...
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A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabiliz...
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Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs, designed at TU Delft, that showed very low levels...
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We describe a balanced heterodyne detection method for a Sagnac interferometer that uses a polarization-dependent beam splitter. The signal and the local oscillator are orthogonally polarized components of a single laser beam, permitting the detection of the signal by subtraction of two photocurrents produced in appropriate polarization projections. Using this scheme, we experimentally demonstr...
متن کاملError Analysis, Design and Modeling of an Improved Heterodyne Nano-Displacement Interferometer
A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabilized s...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2018
ISSN: 1094-4087
DOI: 10.1364/oe.26.000090